Ubuchwephesha bemibhobho yegesi ecocekileyo yinxalenye ebalulekileyo yenkqubo yokubonelela ngegesi ecocekileyo, eyona teknoloji iphambili yokuhambisa igesi ecocekileyo efunekayo ukuya kwindawo yokusetyenziswa kwaye isagcina umgangatho ofanelekileyo;Ubuchwephesha bemibhobho yerhasi obucocekileyo bubandakanya uyilo oluchanekileyo lwenkqubo, ukukhethwa kwezinto zokufakelwa kunye nezixhobo, ukwakhiwa kunye nofakelo, kunye novavanyo.Kwiminyaka yakutshanje, iimfuno ezingqongqo ngakumbi kumxholo wokucoceka kunye nokungcola kweegesi eziphezulu zokucoceka ekuveliseni iimveliso ze-microelectronics ezimele iisekethe ezinkulu ezihlangeneyo zenze iteknoloji yemibhobho yeegesi ezicocekileyo eziphakamileyo zixhalabile kwaye zigxininiswe.Oku kulandelayo kushwankathelo olufutshane lwemibhobho yegesi ecocekileyo ukusuka ekukhethweni kwezintoof ukwakhiwa, kunye nokwamkelwa kunye nolawulo lwemihla ngemihla.
Iintlobo zeegesi eziqhelekileyo
Ukuhlelwa kweegesi eziqhelekileyo kumashishini ombane:
Iigesi eziqhelekileyo(Irhasi eninzi）ihydrogen (H2)initrogen (N2), ioksijini (O2Argon (A2), njl.
Iigesi ezikhethekileyongaba SiH4 ,PH3 ,B2H6 ,A8H3 ,CL ,HCL,CF4 ,NH3,I-POCL3, SIH2CL2 SIHCL3,NH3, BCL3 ,SIF4 ,I-CLF3 ,CO,C2F6, N2O,F2,HF,I-HBR SF6…… njl.
Iindidi zeegesi ezikhethekileyo zinokuhlelwa ngokubanzi njengezinto ezidlayoigesi, inetyhefuigesi, ezinokutshaigesi, ezinokutshaigesi, ineziigesi, njl. Iigesi ze-semiconductor ezisetyenziswa ngokuqhelekileyo zihlelwa ngolu hlobo lulandelayo.
(i) Iyadleka / inetyhefuigesi: HCl , BF3, WF6, HBr , SiH2Cl2, NH3, PH3, Cl2, BCl3…njl.
(ii) Ukutshaigesi: H2, CH4, SiH4, PH3, ASH3, SiH2Cl2, B2H6, CH2F2,CH3F, CO...njl.
(iii) ukutshaigesi:O2, Cl2N2O, NF3... njl.
(iv) Ukungangeniigesi: N2, CF4, C2F6, C4F8,SF6, CO2, Ne, Kr, Yena...njl.
Iigesi ezininzi ze-semiconductor ziyingozi kumzimba womntu.Ngokukodwa, ezinye zezi gesi, ezifana ne-SiH4 ukutshisa okuzenzekelayo, ngokude nje ukuvuza kuya kusabela ngobundlobongela kunye ne-oksijini emoyeni kwaye iqale ukutshisa;kunye neASH3inetyhefu kakhulu, nakuphi na ukuvuza okuncinci kunokubangela umngcipheko wobomi bomntu, kungenxa yezi ngozi ezicacileyo, ngoko ke iimfuno zokhuseleko loyilo lwenkqubo ziphezulu kakhulu.
Umda wokusetyenziswa kweegesi
Njengesixhobo esibalulekileyo esisisiseko soshishino lwanamhlanje, iimveliso zegesi zisetyenziswa ngokubanzi, kwaye inani elikhulu leegesi eziqhelekileyo okanye iigesi ezikhethekileyo zisetyenziselwa isinyithi, isinyithi, i-petroleum, imboni yeekhemikhali, oomatshini, i-electronics, iglasi, i-ceramics, izinto zokwakha, ukwakhiwa. , ukucubungula ukutya, amayeza kunye namacandelo ezonyango.Ukusetyenziswa kwerhasi kunempembelelo ebalulekileyo kubuchwephesha obuphezulu kwezi nkalo ngokukodwa, kwaye yigesi yayo yezinto ekrwada eyimfuneko okanye inkqubo yegesi.Kuphela ngeemfuno kunye nokukhuthazwa kwamacandelo ahlukeneyo amashishini amatsha kunye nesayensi kunye netekhnoloji yanamhlanje, iimveliso zoshishino lwegesi zinokuphuhliswa ngokunyuka kunye nemida ngokweendlela ezahlukeneyo, umgangatho kunye nobuninzi.
Ukusetyenziswa kwegesi kwi-microelectronics kunye ne-semiconductor industry
Ukusetyenziswa kwegesi kuye kwahlala kudlala indima ebalulekileyo kwinkqubo ye-semiconductor, ngokukodwa inkqubo ye-semiconductor isetyenziswe ngokubanzi kumashishini ahlukeneyo, ukusuka kwi-ULSI yendabuko, i-TFT-LCD ukuya kwi-micro-electro-mechanical (MEMS) industry, yonke into. esebenzisa inkqubo ebizwa ngokuba yi-semiconductor njengenkqubo yokwenziwa kweemveliso.Ukucoceka kwegesi kunempembelelo eqinisekileyo ekusebenzeni kwamacandelo kunye nemveliso yemveliso, kwaye ukhuseleko lokunikezelwa kwegesi luhambelana nempilo yabasebenzi kunye nokhuseleko lwemisebenzi yezityalo.
Ukubaluleka kwemibhobho yococeko oluphezulu ekuthuthweni kwegesi ecocekileyo
Kwinkqubo yokunyibilika kwensimbi engenasici kunye nokwenza izinto eziphathekayo, malunga ne-200g yegesi inokufunxwa ngetoni nganye.Emva kokucutshungulwa kwentsimbi engatyiwayo, kungekuphela nje umphezulu wayo oncangathi ngokungcola okwahlukeneyo, kodwa nakwi-lattice yayo yesinyithi nayo yafunxa umlinganiselo othile werhasi.Xa kukho ukuhamba komoya kulo mbhobho, intsimbi efunxa le ndawo yerhasi iya kuphinda ingene kumoya, ingcolise irhasi esulungekileyo.Xa ukuhamba komoya kumbhobho kungaqhubeki, ityhubhu ibhengeza igesi phantsi koxinzelelo, kwaye xa ukuphuma komoya kuyeka ukudlula, irhasi edityaniswe ngumbhobho yenza ukuhla koxinzelelo ukuze kusonjululwe, kwaye igesi esonjululweyo ingena kwirhasi ecocekileyo kwityhubhu. njengobumdaka.Ngelo xesha, i-adsorption kunye nesisombululo iphinda iphindwe, ukwenzela ukuba isinyithi kwindawo yangaphakathi yombhobho iphinde ivelise inani elithile lomgubo, kwaye le ngqungquthela yothuli lwensimbi ingcolisa igesi ecocekileyo ngaphakathi kwityhubhu.Olu phawu lombhobho luyimfuneko ekuqinisekiseni ukucoceka kwegesi ehanjiswayo, engadingi nje ukugudiswa okuphezulu kakhulu kwendawo yangaphakathi yombhobho, kodwa kunye nokuxhatshazwa okuphezulu.
Xa kusetyenziswa irhasi esebenza ngamandla e-Corrosion, imibhobho yentsimbi engatyiwayo kufuneka isetyenziswe kwimibhobho.Ngaphandle koko, umbhobho uya kuvelisa amabala e-corrosion kwi-corrosion surface ngenxa ye-corrosion, kwaye kwiimeko ezinzulu, kuya kubakho indawo enkulu yokuhluthwa kwesinyithi okanye i-perforation, eya kungcolisa igesi ecocekileyo ukuba isasazwe.
Ukudityaniswa kwe-high-purity and high-clean-clean gas transmission and distribution pipelines of flow flow rates.
Ngokomgaqo, zonke zidibene, kwaye iibhubhu ezisetyenzisiweyo zifunekayo ukuba kungabikho utshintsho kwintlangano xa kufakwe i-welding.Izinto eziphathekayo ezinomxholo ophezulu wekhabhoni zixhomekeke kwi-air permeability ye-welded parts xa i-welding, eyenza ukungena ngokulinganayo kweegesi ngaphakathi nangaphandle kombhobho kwaye itshabalalise ubunyulu, ukoma kunye nokucoceka kwegesi ehanjiswayo, okukhokelela ekulahlekelweni kwegesi. yonke imizamo yethu.
Isishwankathelo, kwi-high-purity gas kunye nombhobho okhethekileyo wokuhambisa igesi, kuyimfuneko ukusebenzisa unyango olukhethekileyo lombhobho wensimbi engenasici, ukwenza inkqubo yepayipi yokucoca ephezulu (kubandakanywa imibhobho, i-fittings, i-valve, i-VMB, i-VMP) ukuhanjiswa kwerhasi yococeko oluphezulu kunomsebenzi obalulekileyo.
Ingcamango jikelele yobugcisa obucocekileyo bokuhambisa kunye nokuhanjiswa kwemibhobho
Ukuhanjiswa kwegesi ecocekileyo kakhulu kunye necocekileyo ngemibhobho kuthetha ukuba kukho iimfuno ezithile okanye ulawulo lwemiba emithathu yerhasi ekufuneka ithuthwe.
Ukucoceka kwerhasi: Isiqulatho somoya wokungcola kucoceko lwe-gGas: Umxholo womoya wokungcola kwirhasi, edla ngokuchazwa njengepesenti yococeko lwerhasi, efana ne-99.9999%, ekwachazwa njengomlinganiselo womthamo womxholo wobumdaka ppm, ppb, ppt.
Ukoma: ubungakanani bokulandela ukufuma kwirhasi, okanye ubungakanani obubizwa ngokuba bumanzi, obudla ngokubonakaliswa ngokwendawo yombethe, njengendawo yoxinzelelo lwe-atmospheric dew point -70.C.
Ucoceko: inani lamasuntswana angcolisekileyo aqulethwe kwirhasi, ubungakanani bamasuntswana eµm, mangaphi amasuntswana/M3 okuvakalisa, kumoya oxinanisiweyo, ngokuqhelekileyo kubonakaliswa ngokwemigaqo yokuba zingaphi ii-mg/m3 zeentsalela eziqinileyo ezingenakuthintelwa, eziquka umxholo we-oyile. .
Ukuhlelwa kobungakanani bongcoliseko: amasuntswana angcolisekileyo, ikakhulu abhekiselele ekukhunjweni kwemibhobho, ukunxiba, ukubola okwenziwa ngamasuntswana esinyithi, amasuntswana othuli olusemoyeni, kunye neemicroorganisms, i-phages kunye namathontsi erhasi aqulathe ukufuma, njl. yahlulwe yaba
a) Amasuntswana amakhulu - ubungakanani besuntswana ngaphezulu kwe-5μm
b) I-particle - ubukhulu bezinto phakathi kwe-0.1μm-5μm
c) Amasuntswana e-Ultra-micro - ubungakanani besuntswana elingaphantsi kwe-0.1μm.
Ukuze kuphuculwe ukusetyenziswa kobu buchwepheshe, ukwazi ukuqonda ukuqonda ubungakanani besuntswana kunye neeyunithi ze-μm, iseti yesimo sesuntswana elithile linikezelwe kwireferensi.
Oku kulandelayo luthelekiso lwamasuntswana athile
| Igama / ubungakanani besuntswana (µm) | Igama / ubungakanani besuntswana (µm) | Igama/ Ubungakanani besuntswana (µm) |
| Intsholongwane 0.003-0.0 | I-aerosol 0.03-1 | I-Aerosolized microdroplet 1-12 |
| Amafutha eNyukliya 0.01-0.1 | Ipeyinti 0.1-6 | Bhabha uthuthu 1-200 |
| Ikhabhoni emnyama 0.01-0.3 | Umgubo wobisi 0.1-10 | I-Pesticide 5-10 |
| I-Resin 0.01-1 | Iintsholongwane 0.3-30 | Uthuli lwesamente 5-100 |
| Umsi wecuba 0.01-1 | Uthuli lwesanti 0.5-5 | Poleni 10-15 |
| I-Silicone 0.02-0.1 | I-Pesticide 0.5-10 | Iinwele zomntu 50-120 |
| Ityuwa yekristale 0.03-0.5 | Uthuli lwesulfure olugxininisiweyo 1-11 | Isanti yolwandle 100-1200 |
Ixesha lokuposa: Jun-14-2022