Itekhnoloji yokucoceka ecocekileyo yegesi yinxalenye ebalulekileyo yenkqubo yokubonelela ngerhasi ecocekileyo, eyitekhnoloji ephambili yokuhambisa igesi ecocekileyo efunekayo kwinqanaba lokusetyenziswa kwaye igcine umgangatho ofanelekileyo; Itekhnoloji yokucoceka ecocekileyo ibandakanya uyilo oluchanekileyo lwenkqubo, ukhetho lwezixhobo kunye nezixhobo, ulwakhiwo kunye nofakelo kunye novavanyo. Kwiminyaka yakutshanje, ezona mfuno ziphakameyo kubunyulu kunye nokungcola kwezigaba eziphezulu ekuveliseni iimboniselo ze-microlectronis ezimelwe yitekhnoloji yokucoceka ye-piking yeegesi eziphezulu kwaye zigxininiswa. Oku kulandelayo sisishwankathelo esifutshane se-gesity gesity gesi yegesi ephezulu ukusuka ekukhetheni izinto ezibonakalayoof Ukwakhiwa, kunye nokwamkela nolawulo lwemihla ngemihla.
Iindidi zeegesi eziqhelekileyo
Ukwahlulahlulwa kweegesi eziqhelekileyo kwiShishini le-elektroniki:
Iigesi eziqhelekileyo(Irhasi enkulu): i-hydrogen (h2), initrogen (n2), ioksijini (o2), Argon (a2), njl.
Iigesi ezikhethekileyoyiSih4 ,PH3 ,B2H6 ,A8H3 ,CL ,Hcl,CF4 ,NH3,I-POCL3, I-Sih2cl2 I-Sihcl3,NH3, I-bcl3 ,I-SIF4 ,I-CLF3 ,Co,C2F6, N2o,F2,Hf,Hbr sf6...... njl njl.
Iindidi zeegesi ezikhethekileyo zinokuhlelwa ngokubanziirhasi, inetyhefuirhasi, enokutshairhasi, zinokutshairhasi, i-intertirhasi, njl njl.
(i) ityhefu / inetyhefuirhasi: I-HCL, bf3, Wf6, Hbr, Sih2Cl2, NH3, Ph3, Clus2, I-bcl3... njl.
(ii) Ukuvuthairhasi: H2, Ch4, Sih4, Ph3, Ash3, Sih2Cl2, B2H6, Ch2f2,Ch3F, co ... njl.
(iii) unomdlairhasi: O2, Clus2, N2O, nf3... njl.
(iv) Inertirhasi: N2, Cf4, C2F6, C4F8,Sf6, Co2, Ne, kr, ... njl.
Iigesi ezininzi ze-semiconductors ziyingozi emzimbeni womntu. Ngokukodwa, ezinye zezi gesi, ezinjengeSih4 Ukudibana okuzenzekelayo, okoko njengokuvuza kuya kuphinda kwenziwe ngobundlongondlongo ngeoksijini emoyeni kwaye uqalise ukutshisa; kunye ne-ash3Inetyhefu kakhulu, nayiphi na imizobo encinanana inokubangela umngcipheko wobomi bomntu, kungenxa yezi zengozi ezibonakalayo, ngoko ke iimfuno zokhuseleko lwenkqubo ziphezulu kakhulu.
Umda wesicelo seegesi
Njengezinto ezibalulekileyo eziluhlaza zeshishini, iimveliso zegesi zisetyenziswa ngokubanzi, kwaye inani elikhulu leegesi okanye iigesi ezikhethekileyo zisetyenziswa kwi-metallgy, i-gesel, i-ipetroli, i-cell, i-ceramaum, i-ceramics, i-Metico, i-Metico, i-Metico, i-Metico Ukusetyenziswa kwegesi kunefuthe elibalulekileyo kwitekhnoloji ephezulu yezi ntsimi ngokukodwa, kwaye yirhasi yayo yokwenyama okanye inkqubo. Kuphela ziimfuno kunye nokukhuthaza amacandelo ahlukeneyo ophuhliso kunye nesayensi yale mihla kunye neTekhnoloji, iimveliso zeShishini zeRhasi zinokuphuhliswa zitsiba kunye nemida ngokwenani.
Isicelo segesi kwii-microelectiic kunye nemveliso ye-semicondcuctor
Ukusetyenziswa kwegesi bekusoloko kudlala indima ebalulekileyo kwinkqubo ye-semicondcuctor, ngakumbi inkqubo ye-semicondcuctor isetyenziswe ngokubanzi kumashishini ahlukeneyo, ukusuka kwi-ULSI ye-ILSI, kwi-ULFI ye-ILSI, i-TFTI, i-ILFI yeSiko-Meeco-Meetication (i-MMS) yenkqubo yemveliso yemveliso. Ukucoceka kwegesi kunefuthe lokuthatha isigqibo sezinto kunye nezivuno zemveliso, kwaye ukhuseleko lokubonelela ngegesi kunxulumene nempilo yabasebenzi kunye nokhuseleko lwemisebenzi.
Ukubaluleka kwe-piprity ecocekileyo ephezulu kwizithuthi eziphezulu zegesi
Kwinkqubo yokunyibilika kwentsimbi engenasitali kunye nokwenza izinto, malunga ne-200g yegesi inokuthathwa ngetoni nganye. Emva kokulungiswa kwentsimbi engenasimo, hayi kuphela umphezulu wayo onamathele ungcoliseko olwahlukileyo, kodwa kunye ne-lattere yayo yentsimbi ithathe isixa esithile serhasi. Xa kukho i-moya ngombhobho, intsimbi ifumana le nxalenye yegesi iya kuphinda ifake i-moya, ingcolisa igesi ecocekileyo. Xa umoya ovuthuzayo wetyhubhu uhambile, ityhubhu inikezela igesi phantsi koxinzelelo, kwaye xa i-moya igqitha, kwaye irhasi ecociweyo ingena kwigesi ecocekileyo kwityhubhu. Kwangelo xesha, ukufundwa kunye nokusonjululwa kuyaphindwa, ukuze isinyithi esikumphezulu wetyhubhu sivelisa inani elithile lomgubo, kwaye le ntshukumo ingcolise irhasi ecocekileyo ngaphakathi kwerhasi. Olu phawu lwetyhubhu lubalulekile ekuqinisekiseni ukucoceka kwegesi ethuthayo, efuna kungekuphela nje i-tube engaphakathi yetyhubhu, kodwa kunye nokugula okuphezulu.
Xa irhasi enentsebenzo eqinileyo eqinileyo isetyenziswa, imibhobho yentsimbi enganyangekiyo mayisetyenziselwe ukuqiniswa. Ngaphandle koko, umbhobho uya kuvelisa amabala okunyanzelwa kumphezulu wangaphakathi ngenxa yokulungela, kwaye kwiimeko ezinzulu, kuya kubakho indawo enkulu yentsimbi okanye i-ards, eya kuthi ingcolise igesi ecocekileyo ukuba isasazwe.
Unxibelelwano lucocekile olunyulu kunye nokucoceka kwegesi ecocekileyo kunye nokuhambisa imibhobho yosasazo yamaxabiso amakhulu ukuhamba.
Ngokomgaqo, bonke bade, kwaye iityhubhu ezisetyenzisiweyo ziyafuneka ukuba azinantsingiselo embuthoni xa i-welding isetyenzisiwe. Izinto eziphezulu kakhulu zomxholo wekhabhoni ziphantsi komoya wezinto zedledni xa i-welding yegesi ngaphakathi nangaphandle kwegesi, ikhutshelwe kwilahleko yazo zonke iinzame zethu.
Kwisishwankathelo, igesi ecocekileyo ephezulu kunye ne-vipi yerhasi ekhethekileyo, kuyimfuneko ukusebenzisa impatho ekhethekileyo yentsimbi, ukwenza imibhobho ye-pipelity ecocekileyo (kubandakanya imibhobho, i-vall, i-valves, i-vmp) kwi-gesi yokucoceka kwabantu abaphantsi kwegesi.
Ingcinga ngokubanzi yeTekhnoloji yokuHamba yokuTshintshela kunye nemibhobho yokuHanjiswa
Ukudluliselwa komzimba ococekileyo kakhulu kunye nokucoca igesi ecocekileyo kuthetha ukuba kukho iimfuno ezithile okanye ulawulo lwamacandelo amathathu erhasi ukuba ithuthwe.
Ukucoceka kwegesi: Umxholo wemozulu yokucoceka kwi-GBAAY: Umxholo womoya ongenangqengqelo, onje ngepesenti ye-PRM, ichazwe njengomyinge wevolumu ye-PPM, i-PPB, i-PPB.
Ukomisa: Isixa sobume be-trace kwigesi, okanye isixa esibizwa ngokuba simanzi, sihlala sivezwe ngokwemigaqo yendawo yokuphuma kwe-Dew, njenge-Atmospheric cast Pow -70. C.
Ucoceko: Inani lamasuntsu olungcolisekileyo olukwiigesi, ubungakanani be-paunticle ye-μm, ukuba amangaphi amasuntswana / i-M3 yokuchaza, i-Mg / M3 yentsalela, egubungela umxholo weoyile.
Ubungakanani bobungakanani bokungcola: Amasuntswana angcolisayo, ikakhulu abhekisa kwi-Pipeliline Asundus, i-Ismospheric Smoot Asundus, kunye nobungakanani be-rances yegesi eyahlulwe
a) Amasuntswana amakhulu - ubungakanani be-paunticle ngaphezulu kwe-5μm
b) I-pausticle-Ububanzi bezixhobo phakathi kwe-0.1μm-5μm-5μm
c) I-Ultra-micro-micro-i-paunticle ubungakanani ngaphantsi kwe-0.1μm.
Ukwenzela ukomeleza ukusetyenziswa kwale teknoloji, ukuze ukwazi ukubona ukuqonda kwe-particle ubungakanani kunye ne-μm iyunithi, iseti yendawo ethile ibonelelwa ngokubhekisele kwireferensi
Oku kulandelayo luthelekiso lwamasuntswana athile
| Igama / ubungakanani be-suricle (μm) | Igama / ubungakanani be-suricle (μm) | Igama / ubungakanani be-suricle (μm) |
| Ntsholongwane 0.003-0.0 | I-Aerosol 0.03-1 | I-Aerolsople i-microdrolet 1-12 |
| I-nuel yenyukliya 0.01-0.1 | Ipeyinti 0.1-6 | Bhabha i-ash 1-200 |
| I-carbon emnyama 0.01-0.3 | I-powder yobisi 0.1-10 | I-pesticide 5-10 |
| I-resin 0.01-1 | I-bacteria 0.3-30 | Uthuli lwesamente 5-100 |
| Umsi wecuba 0.01-1 | Uthuli lweSand 0.5-5 | Pollen 10-15 |
| I-Silicone 0.02-0.1 | I-dosticide 0.5-10 | Iinwele zomntu 50-120 |
| I-crystall ityiwa eyi-0.03-0.5 | I-sulfure yesalfure yothuli lwe-1-11 | Isanti yolwandle 100-1200 |
IXESHA LOKUQALA: Jun-14 ukuya ku-2022