Njengoko imarike ye-semiconductorctor ikhula, imigangatho yobunyulu kunye nokuchaneka kuba yinto engaphezulu. Enye yezinto ezimiselweyo kumgangatho wemveliso ye-semicondcucy ziigesi ezisetyenzisiweyo kwinkqubo. Ezi gesi zidlala iindima ezininzi kwinkqubo yokuphuhlisa, kubandakanya:
Ulawulo lwenkqubo yokuchaneka
Uthintelo loTyelelo
Ukuphuculwa kwePropathi yePropathi
Ukwenza la macala, ukubonelela ngegesi kunye nenkqubo yokuhambisa kufuneka isebenze ngokufanelekileyo. Uyilo lweenkqubo zokuphatha ngegesi ezisetyenziswayo kwimveliso ye-semicondcucy kufuneka ixhaswe ngamacandelo aqingqiweyo kunye neendibano ezizenzekileyo ukuqinisekisa ukuveliswa kwe-semicondyudis.
I-Gases isetyenziswe kwimveliso ye-semicondcucy
Inkqubo yemveliso ye-semicontueds ifuna ukusetyenziswa kweegesi ezahlukeneyo kumanqanaba ahlukeneyo kwinkqubo.
Ngelixa iigesi eziqhelekileyo ezinjenge-nitrogen, i-hydrogen, i-Argon kunye ne-helium zinokusetyenziswa kwifom yazo ecocekileyo, iinkqubo ezithile zinokufuna umxube owodwa. I-Silanes okanye iesiloxanes, i-hexlushaordes, i-halides kunye nee-hydrocarbons zimbalwa zegesi ezisetyenzisiweyo kwimveliso ye-semicondcucy. Uninzi lwezi gesi zinokuba yingozi okanye zisebenze kakhulu, zenze imiceli mngeni ekukhetheni nasekukhethwe ngamacandelo kwiinkqubo zegesi.
Nantsi eminye imizekelo:
\ Hodrogen noHelrium banokuvuza ngokulula kwiinkqubo zokwenza imibhobho kunye nenkqubo efanelekileyo ye-Atomic yabo kunye nobunzima.
\ I-SILINAY ivutha kakhulu kwaye inokuthi idibane ngokuzenzekelayo (ngokuzenzekelayo) emoyeni.
\ Nitrogel difluoride esetyenzisiweyo kwifutha, amanqanaba okucoca amayeza iba yigesi enamathela kwi-Greenhouse xa ivuza kwindalo.
\ Hydrogen fluoride (irhasi ye-etching) iphazamisa kakhulu kwi-piipment yensimbi.
\ Trimthylgallium kunye ne-ammonia kunokuba nzima ukuphatha-ukuguquguquka okuncinci kubushushu babo kunye neemfuno zoxinzelelo kunokuchaphazela inkqubo yokufaka.
Ukulawulwa kwenkqubo iimeko zokunciphisa iziphumo ezibi kwezi gesi kufuneka zibe yinto ephambili ngexesha loyilo lwenkqubo. Ibaluleke ngokulinganayo ukusebenzisa ezona zinto ziphezulu zomgangatho ezifana ne-Afk Diaphragm Valves ngexesha lenkqubo yokwakha.
Ukujongana nemiceli mngeni yoyilo
I-Secomiconductor Ibakala le-GEADS ikwimo ezininzi yobunyulu obuphakamileyo kwaye zibonelela ngeemeko ze-Intert okanye ukonyusa iimeko kumanqanaba ohlukeneyo enkqubo yokwenziwa, njengeegesi. Ukuvuza okanye ukungcoliseka kwezi gesi kunokuba neziphumo ezibi. Ke ngoko, kubalulekile ukuba zenziwe izinto zenkqubo ezisetyenziselwa ukutywinwa yi-hermetion kunye nokunganyangeki komgangatho ogudileyo (ipolimucping egudileyo) ukuqinisekisa ukuba akukho nto inokwenzeka kwaye ukuba kwinqanaba eliphezulu lokucoceka lingagcinwa.
Ukongeza, ezinye zezi gesi zinokufudunyelwa okanye zipholile ukufezekisa iimeko zenkqubo oyifunayo. Izinto eziqhotyoshelweyo ziqinisekisa ulawulo lobushushu, olubaluleke kakhulu kwimveliso yokugqibela.
Ukusuka kumthombo wokungena kwinqanaba lokusebenzisa, uluhlu lwe-Afk's olubanzi lwamacandelo luxhasa i-Ultra-sulty ecocekileyo, ubushushu, uxinzelelo kunye nolawulo lokuhamba olufunekayo kwi-semiconductors kunye namagumbi okuhamba.
Iinkqubo ezizezixhobo ezisemgangathweni ezikwi-semicondcuctor fabs
Indima yecandelo elisemgangathweni kunye nokuyilwa kwendlela kubaluleke kakhulu kulawulo oluchanekileyo kunye nokwenziwa okukhuselekileyo kweSemicondors. Amacandelo asetyenzisiweyo kufuneka abe neqhinga kwaye avule ukuba atshatise iimeko ezahlukeneyo ezifunekayo kumanqanaba ohlukeneyo ezemveliso.Fings, imizobo, kunye neebakelo ezilandelayo zibonakaliswa kwezi mpawu zilandelayo:
I-Ultra-subight ephezulu
Amatywina angenamsebenzi
Iqondo lobushushu elilawulwa
ULWAZI LOLWAZI
Ukunganyangeki
Unyango lwePolictrolytic
IXESHA LOKUQALA: I-Oct-09-2023